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Wilton, CT, United States of America

Daniel Nicholas Galburt

USPTO Granted Patents = 52

CIPO Patents = 2 (Patent Applications = 3)

Average Co-Inventor Count = 2.0

ph-index = 13

Forward Citations = 570(Granted Patents)

Forward Citations (Not Self Cited) = 526(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Norwalk, CT (US) (1985 - 1990)
Wilton, CT (US) (1990 - 2019)

Company Filing History:

Asml Holding N.v.

Asml Netherlands B.v.

The Perkin-elmer Corporation

Svg Lithography Systems, Inc.

Silicon Valley Group, Inc.

Sug Lithography Systems, Inc.

Asml Hoding N.v.

8. 2 out of 832,843

Other

patents

where one patent can have more than one assignee

Years Active: 1985-2019

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Areas of Expertise:

Lithography

Reticle Cooling

Fluid Gauge Proximity Sensor

Trajectory Planning

Dual Substrate Stage

Magnetically Levitated Mechanism

High-Resolution Sensors

Patterning Device Support

Optical System Alignment

Microlithographic Apparatus

Gas Flow Control

Wafer Alignment

52 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10423081 - Reticle cooling by non-uniform gas flow (2019-09-24),

2. 9977351 - Patterning device support, lithographic apparatus, and method of controlling patterning device temperature (2018-05-22),

3. 9766557 - Patterning device support, lithographic apparatus, and method of controlling patterning device temperature (2017-09-19),

4. 9632434 - Reticle cooling system in a lithographic apparatus (2017-04-25),

5. 9632433 - Patterning device support, lithographic apparatus, and method of controlling patterning device temperature (2017-04-25),

6. RE42650 - Fluid gauge proximity sensor and method of operating same using a modulated fluid flow (2011-08-29),

7. 7797985 - Method and system for operating an air gauge at programmable or constant standoff (2010-09-21),

8. 7437911 - Method and system for operating an air gauge at programmable or constant standoff (2008-10-21),

9. 7389155 - Method and system for improved trajectory planning and execution (2008-06-17),

10. 7372548 - Levitated reticle-masking blade stage (2008-05-13),

11. 7369214 - Lithographic apparatus and device manufacturing method utilizing a metrology system with sensors (2008-05-06),

12. 7359037 - Drive for reticle-masking blade stage (2008-04-15),

13. 7292308 - System and method for patterning a flexible substrate in a lithography tool (2007-11-06),

14. 7196775 - Patterned mask holding device and method using two holding systems (2007-03-27),

15. 7176593 - Actuator coil cooling system (2007-02-13),

Title: The Innovative Journey of Daniel Nicholas Galburt

Introduction: Daniel Nicholas Galburt, a prolific inventor hailing from Wilton, CT (US), has made significant contributions to the field of technology with his groundbreaking inventions.

Latest Patents: Daniel Nicholas Galburt holds several patents in various technological domains, showcasing his versatility and creativity in innovation.

Career Highlights: Throughout his illustrious career, Daniel Nicholas Galburt has been at the forefront of technological advancements, consistently pushing the boundaries of what is possible. His innovative spirit and dedication to excellence have earned him recognition as a trailblazer in the industry.

Collaborations: Daniel Nicholas Galburt has collaborated with leading tech companies, research institutions, and universities to further develop and refine his inventions. His ability to work effectively in multidisciplinary teams has been instrumental in bringing his ideas to life.

Conclusion: In conclusion, Daniel Nicholas Galburt's passion for innovation and his relentless pursuit of excellence have solidified his reputation as a visionary inventor. His contributions to the world of technology continue to inspire and shape the future of innovation.

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