The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Jul. 13, 2017
Asml Holding N.v., Veldhoven, NL;
Asml Netherlands B.v., Veldhoven, NL;
Earl William Ebert, Oxford, CT (US);
Johannes Onvlee, s-Hertogenbosch, NL;
Samir A. Nayfeh, Shrewsbury, MA (US);
Mark Josef Schuster, Fairfield, CT (US);
Peter A. Delmastro, New Milfort, CT (US);
Christopher Charles Ward, Somerville, MA (US);
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Abdullah Alikhan, Wilton, CT (US);
Daniel Nathan Burbank, Wilton, CT (US);
Daniel Nicholas Galburt, Wilton, CT (US);
Justin Matthew Verdirame, Cambridge, MA (US);
ASML Holding N.V., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A patterning device support for controlling a temperature of a patterning device can include a movable component. The movable component can include a gas inlet for supplying a gas flow across a surface of the patterning device and a gas outlet for extracting the gas flow. The patterning device support can also include a gas flow generator coupled to a duct, for recirculating the gas flow from the gas outlet to the gas inlet.