Location History:
- Oxford, CT (US) (2006 - 2018)
- Wilton, CT (US) (2018)
Company Filing History:
11 out of 618 
7 out of 4,892 
1 out of 4 Years Active: 2006-2025
Title: The Innovative Contributions of Earl William Ebert
Introduction
Earl William Ebert, based in Oxford, CT, is a notable inventor with an impressive portfolio of 11 patents. His work primarily focuses on advancements in lithographic systems and metrology, reflecting a commitment to innovation in the technology sector. Ebert's expertise has significantly contributed to the development of cutting-edge devices used in semiconductor manufacturing.
Latest Patents
Among his latest inventions is a comprehensive metrology system designed to enhance precision in measurements. This system features a beam splitter that divides scattered radiation from a target into two distinct portions, which are analyzed by separate sensors. This innovation aids in correcting errors through an intensity imbalance measurement technique.
Another noteworthy patent involves a patterning device support intended to manage the temperature of patterning devices. This system includes a movable component equipped with a gas inlet and outlet, allowing for effective temperature control by recirculating a gas flow across the surface of the device. Such innovations are vital for optimizing the lithography process in semiconductor fabrication.
Career Highlights
Earl Ebert has made impactful contributions during his tenure at leading companies such as ASML Holding N.V. and ASML Netherlands B.V. These organizations are pivotal in the development of photolithography equipment, essential for manufacturing integrated circuits. Ebert's patents have played a crucial role in advancing the performance and accuracy of these systems.
Collaborations
His research and inventions have often been a product of collaborative efforts with renowned colleagues, including Daniel Nicholas Galburt and Johannes Onvlee. Their combined expertise has helped push the boundaries of technology and develop solutions that address complex manufacturing challenges in the semiconductor industry.
Conclusion
Earl William Ebert's innovative spirit and dedication to enhancing lithographic technologies have cemented his status as a prominent inventor in the field. With numerous patents to his name, his contributions continue to shape the future of semiconductor manufacturing, demonstrating the significant impact of research and innovation in technology.