For the Inventor, By the Inventor

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San Jose, CA, United States of America

Silicon Valley Group, Inc.

USPTO Granted Patents = 47

Trademarks = 7

Forward Citations = 1,669

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93 inventors (with patents filed for the assignee):

Emir Gurer (8 out of 20 patents)

Johann Tam (5 out of 5 patents)

Ed C Lee (4 out of 14 patents)

4. Reese Reynolds (3 out of 16 patents)

5. Don Roy Sauer (3 out of 45 patents)

6. Alexander H Slocum (3 out of 34 patents)

7. Edmond R Ward (3 out of 49 patents)

8. Tom Zhong (3 out of 10 patents)

9. James C Grambow (3 out of 6 patents)

10. Donald R Sauer (3 out of 9 patents)

11. Christopher T Ratliff (3 out of 7 patents)

12. Robert Parkash Mandal (3 out of 41 patents)

13. John W Lewellen (3 out of 10 patents)

14. Matthew J Van Doren (3 out of 4 patents)

15. Jeffrey M Kowalski (3 out of 3 patents)

Core Competencies:

Wafer Processing

Lithography

Optical Systems

Thermal Management

Photoresist Coating

Chemical Delivery Systems

Plasma Deposition

Substrate Coating

Gantry Control

Microlithography

Spin Coating

Flat Panel Displays

47 patents: Sort by Forward Citations

1. 6616394 - Apparatus for processing wafers (2003-09-09),

2. 6570713 - Method and apparatus for optimizing the output beam characteristics of a laser (2003-05-27),

3. 6538720 - Lithographic tool with dual isolation system and method for configuring the same (2003-03-25),

4. 6522483 - Optical reduction system with elimination of reticle diffraction induced bias (2003-02-18),

5. 6509952 - Method and system for selective linewidth optimization during a lithographic process (2003-01-21),

6. 6480330 - Ultraviolet polarization beam splitter for microlithography (2002-11-12),

7. 6472643 - Substrate thermal management system (2002-10-29),

8. 6468586 - Environment exchange control for material on a wafer surface (2002-10-22),

9. 6418356 - Method and apparatus for resolving conflicts in a substrate processing system (2002-07-09),

10. 6416318 - Process chamber assembly with reflective hot plate and pivoting lid (2002-07-09),

11. 6414276 - Method for substrate thermal management (2002-07-02),

12. 6387602 - Apparatus and method of cleaning reticles for use in a lithography tool (2002-05-14),

13. 6369874 - Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography (2002-04-09),

14. 6327793 - Method for two dimensional adaptive process control of critical dimensions during spin coating process (2001-12-11),

15. 6324003 - Calcium fluoride (CaF2) stress plate and method of making the same (2001-11-27),

Silicon Valley Group, Inc. is a technology company based in Silicon Valley, California. With over 30 years of experience, they specialize in providing innovative solutions and products for the semiconductor and precision manufacturing industries. Their advanced equipment and systems enhance the performance and productivity of semiconductor manufacturing processes, contributing to the development of cutting-edge technologies. Visit their website to learn more about their industry-leading solutions and services.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

47 Patents

#183 in San Jose, CA

#1,711 in California

#7,182 in US

#14,392 in the World

San Jose, CA, United States of America

Silicon Valley Group, Inc.

Forward Citations = 1,669

93 inventors:

Emir Gurer (8 out of 20 patents)

Johann Tam (5 out of 5 patents)

Ed C Lee (4 out of 14 patents)

4. Reese Reynolds (3 out of 16 patents)

5. Don Roy Sauer (3 out of 45 patents)

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