The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Mar. 20, 2000
Applicant:
Inventors:
Emir Gurer, Scotts Valley, CA (US);
Tom Zhong, Santa Clara, CA (US);
John W. Lewellen, San Jose, CA (US);
Eddie Lee, Cupertino, CA (US);
Assignee:
Silicon Valley Group, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 5/08 ; B05D 3/12 ;
U.S. Cl.
CPC ...
F26B 5/08 ; B05D 3/12 ;
Abstract
A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.