Company Filing History:
Years Active: 2002-2011
Title: Chi-Tung Huang: Innovator in Semiconductor Processing
Introduction
Chi-Tung Huang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 14 patents. His work focuses on enhancing manufacturing processes that are critical to the semiconductor industry.
Latest Patents
Among his latest patents, Chi-Tung Huang has developed innovative systems and methods for back end of line processing of semiconductor circuits. This BEOL manufacturing process involves forming a via process between two metal lines on a semiconductor wafer. The process includes depositing a portion of a first metal adhesion layer within a patterned via hole, followed by a cooling step. This cooling step is crucial as it minimizes thermal history, thereby reducing aluminum extrusion at the via interfaces. Another notable patent is a method for symmetric deposition of a metal layer over a metal layer registration key. This method utilizes MOCVD to form the metal layer, allowing for accurate detection of the metal layer registration key and improving overlay shift.
Career Highlights
Chi-Tung Huang has established himself as a key figure in the semiconductor industry through his innovative approaches and solutions. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, showcasing his ability to address industry challenges effectively.
Collaborations
He has collaborated with notable colleagues such as Yung-Tai Hung and Kuang-Chao Chen, contributing to advancements in semiconductor technology.
Conclusion
Chi-Tung Huang's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively, paving the way for future innovations.