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Hsinchu, Taiwan

Chi-Tung Huang

This inventor holds 14 USPTO granted patents. Top assignee: Macronix International Co., Ltd.. Active years: 2002-2011.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Chi-Tung Huang. Retrieved from https://idiyas.com/inventor/chi-tung-huang

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 14

% Patents Active = 85.7

Average Co-Inventor Count = 1.7

ph-index = 4

Forward Citations = 33(Granted Patents)


Company Filing History:

goldMedal14 out of 3,609 
 
Macronix International Co., Ltd.
 patents

Years Active: 2002-2011

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14 patents (USPTO):Explore Patents
1. 8003519 - Systems and methods for back end of line processing of semiconductor circuits (2011-08-23),
2. 7553755 - Method for symmetric deposition of metal layer (2009-06-30),
3. 7544618 - Two-step chemical mechanical polishing process (2009-06-09),
4. 7498257 - Methods for metal ARC layer formation (2009-03-03),
5. 7361601 - Chemical mechanical polish process and method for improving accuracy of determining polish endpoint thereof (2008-04-22),
6. 7071102 - Method of forming a metal silicide layer on non-planar-topography polysilicon (2006-07-04),
7. 6706626 - Method of fabricating contact plug (2004-03-16),
8. 6688969 - Method for planarizing a dielectric layer of a flash memory device (2004-02-10),
9. 6565705 - Wafer carrier used for chemical mechanic polishing (2003-05-20),
10. 6559490 - Method of processing dielectric layer in ferroelectric RAM and structure of the like (2003-05-06),
11. 6521922 - Passivation film on a semiconductor wafer (2003-02-18),
12. 6514821 - Method for planarizing dielectric layer of flash memory (2003-02-04),
13. 6509249 - Method of fabricating shallow trench isolation (2003-01-21),
14. 6407454 - Inter-metal dielectric layer (2002-06-18),

Title: Chi-Tung Huang: Innovator in Semiconductor Processing

Introduction

Chi-Tung Huang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 14 patents. His work focuses on enhancing manufacturing processes that are critical to the semiconductor industry.

Latest Patents

Among his latest patents, Chi-Tung Huang has developed innovative systems and methods for back end of line processing of semiconductor circuits. This BEOL manufacturing process involves forming a via process between two metal lines on a semiconductor wafer. The process includes depositing a portion of a first metal adhesion layer within a patterned via hole, followed by a cooling step. This cooling step is crucial as it minimizes thermal history, thereby reducing aluminum extrusion at the via interfaces. Another notable patent is a method for symmetric deposition of a metal layer over a metal layer registration key. This method utilizes MOCVD to form the metal layer, allowing for accurate detection of the metal layer registration key and improving overlay shift.

Career Highlights

Chi-Tung Huang has established himself as a key figure in the semiconductor industry through his innovative approaches and solutions. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, showcasing his ability to address industry challenges effectively.

Collaborations

He has collaborated with notable colleagues such as Yung-Tai Hung and Kuang-Chao Chen, contributing to advancements in semiconductor technology.

Conclusion

Chi-Tung Huang's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively, paving the way for future innovations.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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