Anthony R Schepis

Title: Innovations by Anthony R. Schepis: Pioneering Advances in Semiconductor Technology

Introduction

Anthony R. Schepis, an accomplished inventor based in Averill Park, NY, has made significant contributions to the field of semiconductor technology. With a total of 10 patents to his name, Schepis continues to innovate and drive advancements within the industry. His inventive methods focus on improving substrate patterning and enhancing photolithography processes, showcasing his expertise and commitment to technological progress.

Latest Patents

Two of Schepis's most recent patents highlight his innovative capabilities:

1. **Method of Patterning a Substrate Using a Sidewall Spacer Etch Mask** - This patent describes a process for creating a patterned photoresist structure on a substrate. By depositing a conformal layer of spacer material on the sidewall and subsequently removing the patterned photoresist structure, Schepis allows for the substrate to be directionally etched utilizing the sidewall spacer as an etch mask. This method is instrumental in achieving a target critical dimension with precision.

2. **Precision Multi-Axis Photolithography Alignment Correction Using Stressor Film** - This innovation addresses the challenges of overlay alignment during semiconductor fabrication. The method involves applying a stressor film on the backside of a wafer to modify the overlay alignment in a specific direction. This skillful manipulation ensures that semiconductor structures are aligned accurately, ultimately improving manufacturing efficiency.

Career Highlights

Anthony R. Schepis has dedicated his talents to Tokyo Electron Limited, a leading company in the semiconductor industry. His work there emphasizes the importance of innovation in manufacturing technologies. Collaborating with industry professionals, including coworker H. Jim Fulford, has enabled Schepis to refine his methodologies and expand his reach within the semiconductor research community.

Collaborations

Working alongside H. Jim Fulford at Tokyo Electron Limited, Schepis has fostered a collaborative environment focused on innovation. Their joint efforts have led to the development of technologies that address crucial aspects of semiconductor fabrication, enabling more precise and efficient production methods.

Conclusion

Anthony R. Schepis represents a significant force in the semiconductor innovation arena. Through his inventive methods and collaborative efforts, he continues to make an impactful difference in the industry. With 10 patents to his name, Schepis exemplifies the spirit of invention and the pursuit of excellence in advancing technology, paving the way for future breakthroughs in semiconductor manufacturing.