The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Oct. 27, 2023
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Anthony R Schepis, Averill Park, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10P 74/20 (2026.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H10P 74/203 (2026.01); G01R 31/2831 (2013.01);
Abstract
Aspects of the present disclosure provide a method for creating a product-like surrogate test wafer that mimic a product wafer. For example, the method can include providing a second wafer, forming a stress control layer on the second wafer, and activating the stress control layer according to a first bow measurement of a first wafer to modify an internal stress of the stress control layer such that the second wafer and the stress control layer form a surrogate wafer that has a second bow measurement substantially equal to the first bow measurement.