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For the Inventor, By the Inventor

Shanghai, China

Shanghai Micro Electronics Equipment Co., Ltd.

Calculating rank
USPTO Granted Patents = 23

% Expired Patents = 8.7


Trademarks = 1

Forward Citations = 17

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65 inventors (with patents filed for the assignee):

goldMedal Yu Zhu (4 out of 93 patents)

silverMedal Wensheng Yin (4 out of 23 patents)

bronzeMedal Fan Wang (3 out of 129 patents)

4.  Jinchun Hu (3 out of 26 patents)

5.  Kaiming Yang (3 out of 27 patents)

6.  Dengfeng Xu (3 out of 20 patents)

7.  Haihua Mu (3 out of 14 patents)

8.  Ming Lei Zhang (3 out of 222 patents)

9.  Zhao Liu (2 out of 18 patents)

10.  Ya Cheng (2 out of 9 patents)

11.  Zhiyong Yang (2 out of 8 patents)

12.  Liwei Wu (2 out of 7 patents)

13.  Chuxiong Hu (2 out of 5 patents)

14.  Bertrand Plainchamp (2 out of 2 patents)

15.  Renaud Mercier Ythier (2 out of 2 patents)


23 patents:

1. 10658214 - Wafer processing device and method therefor (2020-05-19),
2. 9933703 - Photolithographic illuminator device enabling controlled diffraction (2018-04-03),
3. 9874818 - Photolithographic illuminator that is telecentric in two directions (2018-01-23),
4. 9766054 - Planar motor rotor displacement measuring device and its measuring method (2017-09-19),
5. 9752643 - Negative stiffness system for gravity compensation of micropositioner (2017-09-05),
6. 9588444 - Balance mass system shared by workpiece table and mask table, and lithography machine (2017-03-07),
7. 9519231 - Method for measuring and calibrating centroid of coarse stage of photolithography tool (2016-12-13),
8. 9455164 - Laser annealing apparatus and laser annealing method (2016-09-27),
9. 9448488 - Off-axis alignment system and alignment method (2016-09-20),
10. 9310782 - Method for measuring displacement of planar motor rotor (2016-04-12),
11. 9256138 - Method for measuring distortion of projection objective (2016-02-09),
12. 9195146 - Interference exposure device and method (2015-11-24),
13. 9188434 - Backside alignment apparatus and method (2015-11-17),
14. 9036155 - Six-axis four-subdividing interferometer (2015-05-19),
15. 9036154 - Four-axis four-subdividing interferometer (2015-05-19),
Company Overview
Shanghai Micro Electronics Equipment Co., Ltd. specializes in the development and manufacturing of advanced semiconductor equipment. The company focuses on providing innovative solutions for the microelectronics industry, particularly in the areas of lithography, etching, and deposition technologies. With a strong emphasis on research and development, SMEIC plays a significant role in enhancing the capabilities of semiconductor fabrication processes, contributing to the growth of the electronics sector in China and beyond.
Profile summary synthesized from public USPTO records and patent filings.

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USPTO Data Jan 1 1976 - Oct 27 2026

23 Patents

#130 in Shanghai

#1,293 in China

#27,736 in the World

Shanghai, CN
Shanghai, China

Shanghai Micro Electronics Equipment Co., Ltd.

Forward Citations = 17

65 inventors:

goldMedal Yu Zhu (4 out of 93 patents)

silverMedal Wensheng Yin (4 out of 23 patents)

bronzeMedal Fan Wang (3 out of 129 patents)

4.  Jinchun Hu (3 out of 26 patents)

5.  Kaiming Yang (3 out of 27 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Shanghai Micro Electronics Equipment Co., Ltd.. Retrieved from https://idiyas.com/company/shanghai-micro-electronics-equipment-company

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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