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Shanghai, China

Shanghai Micro Electronics Equipment Co., Ltd.

USPTO Granted Patents = 23

EPO Patents = 30

Trademarks = 1

Forward Citations = 17

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65 inventors (with patents filed for the assignee):

Yu Zhu (4 out of 92 patents)

Wensheng Yin (4 out of 23 patents)

Fan Wang (3 out of 127 patents)

4. Jinchun Hu (3 out of 26 patents)

5. Kaiming Yang (3 out of 26 patents)

6. Dengfeng Xu (3 out of 20 patents)

7. Haihua Mu (3 out of 14 patents)

8. Ming Lei Zhang (3 out of 218 patents)

9. Zhao Liu (2 out of 17 patents)

10. Ya Cheng (2 out of 8 patents)

11. Zhiyong Yang (2 out of 8 patents)

12. Liwei Wu (2 out of 7 patents)

13. Chuxiong Hu (2 out of 5 patents)

14. Bertrand Plainchamp (2 out of 2 patents)

15. Renaud Mercier Ythier (2 out of 2 patents)

23 patents: Sort by Forward Citations

1. 10658214 - Wafer processing device and method therefor (2020-05-19),

2. 9933703 - Photolithographic illuminator device enabling controlled diffraction (2018-04-03),

3. 9874818 - Photolithographic illuminator that is telecentric in two directions (2018-01-23),

4. 9766054 - Planar motor rotor displacement measuring device and its measuring method (2017-09-19),

5. 9752643 - Negative stiffness system for gravity compensation of micropositioner (2017-09-05),

6. 9588444 - Balance mass system shared by workpiece table and mask table, and lithography machine (2017-03-07),

7. 9519231 - Method for measuring and calibrating centroid of coarse stage of photolithography tool (2016-12-13),

8. 9455164 - Laser annealing apparatus and laser annealing method (2016-09-27),

9. 9448488 - Off-axis alignment system and alignment method (2016-09-20),

10. 9310782 - Method for measuring displacement of planar motor rotor (2016-04-12),

11. 9256138 - Method for measuring distortion of projection objective (2016-02-09),

12. 9195146 - Interference exposure device and method (2015-11-24),

13. 9188434 - Backside alignment apparatus and method (2015-11-17),

14. 9036155 - Six-axis four-subdividing interferometer (2015-05-19),

15. 9036154 - Four-axis four-subdividing interferometer (2015-05-19),

Shanghai Micro Electronics Equipment Co., Ltd. is a leading manufacturer and supplier of high-quality electronics equipment in Shanghai. With over 20 years of experience, we specialize in the design, development, and production of microelectronics testing equipment. Our products are used by various industries, including semiconductor manufacturing, telecommunications, and consumer electronics. We are committed to providing innovative solutions and exceptional customer service to our clients worldwide.

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Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

23 Patents

#118 in Shanghai

#1,153 in China

#26,804 in the World

Shanghai, China

Shanghai Micro Electronics Equipment Co., Ltd.

Forward Citations = 17

65 inventors:

Yu Zhu (4 out of 92 patents)

Wensheng Yin (4 out of 23 patents)

Fan Wang (3 out of 127 patents)

4. Jinchun Hu (3 out of 26 patents)

5. Kaiming Yang (3 out of 26 patents)

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