The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Aug. 05, 2013
Shanghai Micro Electronics Equipment Co., Ltd., Shanghai, CN;
SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD., Shanghai, CN;
Abstract
An off-axis alignment system includes, sequentially along a transmission path of a light beam, an illumination module (), an interference module () and a detection module (). The interference module () includes: a polarization beam splitter () having four side faces, the illumination module () and the detection modules () both located on a first side of the polarization beam splitter (); a first quarter-wave plate () and a first reflector (), sequentially disposed on a second side opposite to the first side; and a second quarter-wave plate () and a cube-corner prism (), sequentially disposed on a third side of the polarization beam splitter (); and a third quarter-wave plate (), a second reflector () and a lens (), sequentially disposed on a fourth side of the polarization beam splitter (). The second reflector () is located on a rear focal plane of the lens (). A center of a bottom of the cube-corner prism () is situated on an optical axis of the lens (). An off-axis alignment method is also disclosed.