The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Feb. 21, 2013
Shanghai Micro Electronics Equipment Co., Ltd., Shanghai, CN;
Tsinghua University, Beijing, CN;
Yu Zhu, Beijing, CN;
Jinchun Hu, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Yuting Sun, Beijing, CN;
Wensheng Yin, Beijing, CN;
Ming Zhang, Beijing, CN;
Kaiming Yang, Beijing, CN;
Haihua Mu, Beijing, CN;
SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD., Shanghai, CN;
TSINGHUA UNIVERSITY, Beijing, CN;
Abstract
A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals B, B, Band Band magnetic field reference values B, B, Band B; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δand Δare X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value.