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For the Inventor, By the Inventor

Beijing, China

Wensheng Yin

This inventor holds 23 USPTO granted patents and 3 published patent applications, primarily in Laser Interferometry. Top assignees: Tsinghua University, Shanghai Micro Electronics Equipment Co., Ltd., Beijing U-Precision Tech Co., Ltd.. Active years: 2007-2025.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Wensheng Yin. Retrieved from https://idiyas.com/inventor/wensheng-yin

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 23 

% Patents Active = 95.7

Average Co-Inventor Count = 8.9

ph-index = 2

Forward Citations = 16(Granted Patents)


Company Filing History:

goldMedal23 out of 3,148 
 
Tsinghua University
 patents
silverMedal4 out of 23 
 
Shanghai Micro Electronics Equipment Co., Ltd.
 patents
bronzeMedal2 out of 14 
 
Beijing U-Precision Tech Co., Ltd.
 patents
where one patent can have more than one assignee

Years Active: 2007-2025

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Areas of Expertise:
Phase Detection
Laser Interferometer
Displacement Measurement
Grating Interferometer
Planar Motor
Vibration Isolation
Micropositioner
Lithographic Device
Magnetic Suspension
Motion Control
Position-Sensitive Sensor
23 patents (USPTO):Explore Patents
1. 12270645 - High-resolution phase detection method and system based on plane grating laser interferometer (2025-04-08),
2. 11022423 - Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system (2021-06-01),
3. 9904183 - Coarse motion and fine motion integrated reticle stage driven by planar motor (2018-02-27),
4. 9903704 - Three-DOF heterodyne grating interferometer displacement measurement system (2018-02-27),
5. 9885556 - Dual-frequency grating interferometer displacement measurement system (2018-02-06),
6. 9879979 - Heterodyne grating interferometer displacement measurement system (2018-01-30),
7. 9869857 - Optical grating phase modulator for laser interference photoetching system (2018-01-16),
8. 9791789 - Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor (2017-10-17),
9. 9766054 - Planar motor rotor displacement measuring device and its measuring method (2017-09-19),
10. 9752643 - Negative stiffness system for gravity compensation of micropositioner (2017-09-05),
11. 9455650 - Two-dimensional locating method of motion platform based on magnetic steel array (2016-09-27),
12. 9310797 - Single degree of freedom vibration isolating device of linear motor and motion control method thereof (2016-04-12),
13. 9310782 - Method for measuring displacement of planar motor rotor (2016-04-12),
14. 9182217 - Method for measuring displacement of large-range moving platform (2015-11-10),
15. 9030648 - Dual wafer stage exchanging system for lithographic device (2015-05-12),

Title: Innovator Spotlight: Wensheng Yin - Pioneering Precision Measurement Technologies

Introduction:

Wensheng Yin, a prominent inventor based in Beijing, CN, has made significant contributions to the field of precision measurement technologies. With a remarkable portfolio of 22 patents, Yin has been at the forefront of developing innovative solutions for industrial applications.

Latest Patents:

1. Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system: Yin's method focuses on enhancing the calibration process for multi-axis interferometers by introducing redundant interferometers. This approach allows for self-calibration of installation errors, addressing challenges in industrial applications without the need for additional high-precision displacement sensors.

2. Three-DOF heterodyne grating interferometer displacement measurement system: Yin's three-DOF system enables precise displacement measurements based on grating diffraction and optical principles. Offering sub-nanometer resolution and environmentally insensitive capabilities, this system can significantly improve the performance of ultra-precision machinery like lithography stages.

Career Highlights:

Yin's expertise and innovation have been honed through his tenure at prestigious institutions like Tsinghua University and Shanghai Micro Electronics Equipment Co., Ltd. His work showcases a blend of academic rigor and practical industrial applications, positioning him as a pioneering figure in the field of precision measurement technologies.

Collaborations:

Throughout his career, Yin has collaborated with esteemed professionals such as Yu Zhu and Ming Lei Zhang. These partnerships have led to the development of cutting-edge technologies and solutions that have redefined the landscape of precision measurement systems.

Conclusion:

Wensheng Yin's inventive spirit and dedication to advancing precision measurement technologies have solidified his reputation as a trailblazer in the industry. His patented inventions not only demonstrate technical excellence but also promise transformative solutions for a wide range of industrial applications. As he continues to push the boundaries of innovation, Yin remains a driving force in shaping the future of precision measurement technologies.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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