For the Inventor, By the Inventor

Enter assignee name

Beijing U-precision Tech Co., Ltd.

USPTO Granted Patents = 14

Forward Citations = 2

Loading Chart...

Loading Chart...

33 inventors (with patents filed for the assignee):

Yu Zhu (12 out of 92 patents)

Rong Cheng (12 out of 22 patents)

Jinchun Hu (9 out of 26 patents)

4. Kaiming Yang (9 out of 26 patents)

5. Ming Lei Zhang (9 out of 218 patents)

6. Leijie Wang (7 out of 14 patents)

7. Xin Li (6 out of 190 patents)

8. Weinan Ye (5 out of 7 patents)

9. Haihua Mu (4 out of 14 patents)

10. Anlin Chen (3 out of 3 patents)

11. Fan Zhi (3 out of 3 patents)

12. Ming Zhang (3 out of 17 patents)

13. Jin Zhang (2 out of 61 patents)

14. Zhao Liu (2 out of 17 patents)

15. Li Tian (2 out of 56 patents)

14 patents: Sort by Forward Citations

1. 12460917 - Interferometer displacement measurement system and method (2025-11-04),

2. 12393127 - Exposure light beam phase measurement method in laser interference photolithography, and photolithography system (2025-08-19),

3. 12346030 - Device and method for regulating and controlling incident angle of light beam in laser interference lithography (2025-07-01),

4. 12332053 - Heterodyne grating interferometry system based on secondary diffraction (2025-06-17),

5. 12332041 - Heterodyne fiber interferometer displacement measuring system and method (2025-06-17),

6. 12038690 - Laser interference photolithography system (2024-07-16),

7. 11940349 - Plane grating calibration system (2024-03-26),

8. 11703361 - Five-degree-of-freedom heterodyne grating interferometry system (2023-07-18),

9. 11307018 - Two-degree-of-freedom heterodyne grating interferometry measurement system (2022-04-19),

10. 10597172 - Magnetic-fluid momentum sphere (2020-03-24),

11. 10532832 - Magnetic levitation reaction sphere (2020-01-14),

12. 9995569 - Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage (2018-06-12),

13. 9904183 - Coarse motion and fine motion integrated reticle stage driven by planar motor (2018-02-27),

14. 9791789 - Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor (2017-10-17),

Beijing U-precision Tech Co., Ltd. is a leading provider of precision engineering solutions for industries such as aerospace, automotive, and electronics. With a strong focus on research and development, we offer cutting-edge technology and high-quality products to meet the needs of our clients. Our expertise in precision manufacturing and engineering ensures precise and reliable solutions for our customers.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

14 Patents

#181 in Beijing

#1,801 in China

#40,882 in the World

Beijing U-precision Tech Co., Ltd.

Forward Citations = 2

33 inventors:

Yu Zhu (12 out of 92 patents)

Rong Cheng (12 out of 22 patents)

Jinchun Hu (9 out of 26 patents)

4. Kaiming Yang (9 out of 26 patents)

5. Ming Lei Zhang (9 out of 218 patents)

Please report any incorrect information to support@idiyas.com

Loading…