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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12332053 B1

PDFFull Text
Date of Patent:
Jun. 17, 2025

Filed:

Sep. 14, 2021

Heterodyne grating interferometry system based on secondary diffraction

Applicants:

Tsinghua University, Beijing, CN;

Beijing U-precision Tech Co., Ltd., Beijing, CN;

Inventors:

Yu Zhu, Beijing, CN;

Leijie Wang, Beijing, CN;

Ziwen Guo, Beijing, CN;

Ming Zhang, Beijing, CN;

Rong Cheng, Beijing, CN;

Weinan Ye, Beijing, CN;

Zhaokui Cheng, Beijing, CN;

Assignees:

Tsinghua University, Beijing, CN;

Beijing U-Precision Tech Co., Ltd., Beijing, CN;

Attorney:

Holzer Patel Drennan

Primary Examiner:

Tarifur R Chowdhury

Assistant Examiner:

Kaitlyn E Kidwell

Int. Cl.
CPC ...
G01B 9/02002 (2022.01); G01B 9/02 (2022.01); G01B 9/02003 (2022.01); G01B 9/02015 (2022.01); G01B 9/02055 (2022.01); G01B 9/02056 (2022.01); G01B 11/02 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02002 (2013.01); G01B 9/02003 (2013.01); G01B 9/02015 (2013.01); G01B 9/02024 (2013.01); G01B 9/02027 (2013.01); G01B 9/02028 (2013.01); G01B 9/02051 (2013.01); G01B 9/02059 (2013.01); G01B 9/0207 (2013.01); G01B 11/02 (2013.01); G01B 2290/60 (2013.01); G01B 2290/70 (2013.01); G02B 27/283 (2013.01);
Abstract

Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal and a reference interference electrical signal.

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