The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2022
Filed:
Jun. 26, 2019
Tsinghua University, Beijing, CN;
Beijing U-precision Tech Co., Ltd., Beijing, CN;
Yu Zhu, Beijing, CN;
Ming Zhang, Beijing, CN;
Leijie Wang, Beijing, CN;
Fuzhong Yang, Beijing, CN;
Rong Cheng, Beijing, CN;
Xin Li, Beijing, CN;
Weinan Ye, Beijing, CN;
Jinchun Hu, Beijing, CN;
TSINGHUA UNIVERSITY, Beijing, CN;
BEIJING U-PRECISION TECH CO., LTD., Beijing, CN;
Abstract
A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.