The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Apr. 17, 2015
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
Tsinghua University, Beijing, CN;
Beijing U-precision Tech Co., Ltd., Beijing, CN;
Ming Zhang, Beijing, CN;
Yu Zhu, Beijing, CN;
Fan Zhi, Beijing, CN;
Rong Cheng, Beijing, CN;
Kaiming Yang, Beijing, CN;
Zhao Liu, Beijing, CN;
Li Zhang, Beijing, CN;
Huichao Qin, Beijing, CN;
Yanpo Zhao, Beijing, CN;
Li Tian, Beijing, CN;
Weinan Ye, Beijing, CN;
Jin Zhang, Beijing, CN;
Wensheng Yin, Beijing, CN;
Haihua Mu, Beijing, CN;
Jinchun Hu, Beijing, CN;
TSINGHUA UNIVERSITY, Beijing, CN;
BEIJING U-PRECISION TECH CO., LTD., Beijing, CN;
Abstract
A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (), a balance mass (), a drive motor, a mask plate (), a base (), a vibration isolation system (), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.