The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Apr. 02, 2010
Yu Zhu, Beijing, CN;
Ming Zhang, Beijing, CN;
Jingsong Wang, Beijing, CN;
LI Tian, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Guanghong Duan, Beijing, CN;
Jinchun HU, Beijing, CN;
Yu Zhu, Beijing, CN;
Ming Zhang, Beijing, CN;
Jingsong Wang, Beijing, CN;
Li Tian, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Guanghong Duan, Beijing, CN;
Jinchun Hu, Beijing, CN;
Tsinghua University, Beijing, CN;
Abstract
A dual wafer stage exchanging system for a lithographic device is disclosed, said system comprises two wafer stages running between an exposure workstation and a pre-processing workstation, and said two stages are set on a base and suspended above the upper surface of the base by air bearings. Each wafer stages is passed through by a Y-direction guide rail respectively, wherein one end of said guide rail is connected with a main driving unit and another end of said guide rail is detachably coupled with one of the two X-direction auxiliary driving units with single degree of freedom, and said two wafer stages are capable of moving in Y-direction along the guide rails and moving in X-direction under the drive of the auxiliary driving units with single degree of freedom. The position exchange of said two wafer stages can be enabled by the detachment and connection of the Y-direction guide rails and the auxiliary units with single degree of freedom.