Company Filing History:

11 out of 4,296

Tsinghua University

patents

1 out of 23

Shanghai Micro Electronics Equipment Co., Ltd.

patents

where one patent can have more than one assignee

Years Active: 2002-2016

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9455650 - Two-dimensional locating method of motion platform based on magnetic steel array (2016-09-27),

2. 9030648 - Dual wafer stage exchanging system for lithographic device (2015-05-12),

3. 8860927 - Dual-stage exchange system for lithographic apparatus (2014-10-14),

4. 8836918 - Dual-stage exchange system for lithographic apparatus (2014-09-16),

5. 8599361 - Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof (2013-12-03),

6. 8284380 - Dual-stage switching system for lithographic machine (2012-10-09),

7. 8084897 - Micro stage with 6 degrees of freedom (2011-12-27),

8. 7339289 - Synchronous permanent magnet planar motor (2008-03-04),

9. 7259380 - Scanning mechanism of an ion implanter (2007-08-21),

10. 6575676 - Parallel structure of a spatial 3-axis machine tool with three degrees-of-freedom (2003-06-10),

11. 6402444 - Type of parallel machine tool frame driven by slider and extensible strut (2002-06-11),

Title: Innovations of Guanghong Duan

Introduction

Guanghong Duan is a prominent inventor based in Beijing, China. He has made significant contributions to the field of motion systems and lithographic devices. With a total of 11 patents, his work showcases innovative solutions that enhance the efficiency and accuracy of various technologies.

Latest Patents

One of his latest patents is the "Two-dimensional locating method of motion platform based on magnetic steel array." This invention involves placing more than four linear Hall sensors at different positions within the magnetic steel array on the surface of the motion platform. It determines a magnetic flux density distribution model and computes the mass center's position, providing a simple and robust method for planar location in motion systems.

Another notable patent is the "Dual wafer stage exchanging system for lithographic device." This system comprises two wafer stages that operate between an exposure workstation and a pre-processing workstation. The stages are suspended above a base by air bearings and can move in both Y and X directions, allowing for efficient position exchange through a unique guide rail system.

Career Highlights

Guanghong Duan has worked with esteemed institutions such as Tsinghua University and Shanghai Micro Electronics Equipment Co., Ltd. His experience in these organizations has contributed to his expertise in developing advanced technologies.

Collaborations

Throughout his career, Guanghong has collaborated with notable individuals, including Yu Zhu and Wensheng Yin. These partnerships have fostered innovation and the sharing of ideas in the field of technology.

Conclusion

Guanghong Duan's contributions to the field of motion systems and lithographic devices highlight his innovative spirit and dedication to advancing technology. His patents reflect a commitment to solving complex problems and improving existing systems.

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