The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Apr. 02, 2010
Yu Zhu, Beijing, CN;
Ming Zhang, Beijing, CN;
Jingsong Wang, Beijing, CN;
LI Tian, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Guanghong Duan, Beijing, CN;
Jinchun HU, Beijing, CN;
Yu Zhu, Beijing, CN;
Ming Zhang, Beijing, CN;
Jingsong Wang, Beijing, CN;
Li Tian, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Guanghong Duan, Beijing, CN;
Jinchun Hu, Beijing, CN;
Tsinghua University, Beijing, CN;
Abstract
A dual-stage exchange system for a lithographic apparatus comprises a silicon chip stage () operating in an exposure workstation () and a silicon chip stage () operating in a pre-processing workstation (). Each silicon chip stage () is supported by a six-freedom micro-motion stage, respectively. The silicon chip stage () and the six-freedom micro-motion stage form a silicon chip stage group. The two silicon chip stage groups are provided on the same rectangular base stage () and suspended on an upper surface () of the base sage by air bearings. A double-freedom driving unit () is provided on each edge of the base stage (), respectively. The six-freedom micro-motion stage of the silicon chip stage group has an upper layer driver and a lower layer driver, capable of achieving six-freedom control. The double-freedom driving units () on the long edges of the base stage are connected with the bases () of the six-freedom micro-motion stages, and the double-freedom driving units () on the short edges of the base stage are connected with the stator coils () of the upper layer drivers of the six-freedom micro-motion stages.