The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Mar. 14, 2008
Yu Zhu, Beijing, CN;
Jinsong Wang, Beijing, CN;
Ming Zhang, Beijing, CN;
Guang LI, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Guanghong Duan, Beijing, CN;
Kaiming Yang, Beijing, CN;
Yu Zhu, Beijing, CN;
Jinsong Wang, Beijing, CN;
Ming Zhang, Beijing, CN;
Guang Li, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Guanghong Duan, Beijing, CN;
Kaiming Yang, Beijing, CN;
Tsinghua University, Beijing, CN;
Abstract
A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment fields is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and θdirections and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, θand θdirections. Direct driving by electromagnetic force is used in the invention. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current.