The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2018
Filed:
Jan. 13, 2014
Tsinghua University, Beijing, CN;
Yu Zhu, Beijing, CN;
Ming Zhang, Beijing, CN;
Leijie Wang, Beijing, CN;
Rong Cheng, Beijing, CN;
Kaiming Yang, Beijing, CN;
Zhao Liu, Beijing, CN;
Jinchun Hu, Beijing, CN;
Wensheng Yin, Beijing, CN;
Haihua Mu, Beijing, CN;
Chuxiong Hu, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Tsinghua University, Beijing, CN;
Abstract
An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.