The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Jan. 10, 2014
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, CN;
Shanghai Micro Electronics Equipment Co., Ltd., Shanghai, CN;
Jianfang Chen, Shanghai, CN;
Zhaogu Cheng, Shanghai, CN;
Ya Cheng, Shanghai, CN;
Huijie Huang, Shanghai, CN;
Feng Chi, Shanghai, CN;
Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences, Shanghai, CN;
Shanghai Micro Electronics Equipment Co., Ltd., Shanghai, CN;
Abstract
Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.