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Danvers, MA, United States of America

Ibis Technology Corporation

USPTO Granted Patents = 23

Forward Citations = 398

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26 inventors (with patents filed for the assignee):

Robert Dolan (5 out of 5 patents)

Bernhard F Cordts, Iii (5 out of 5 patents)

Julian G Blake (4 out of 59 patents)

4. William Leavitt (4 out of 9 patents)

5. Steven Richards (4 out of 9 patents)

6. Geoffrey Ryding (3 out of 56 patents)

7. Yuri Erokhin (3 out of 4 patents)

8. Maria J Anc (3 out of 3 patents)

9. Robert S Andrews (3 out of 3 patents)

10. Theodore H Smick (3 out of 50 patents)

11. Marvin Farley (2 out of 41 patents)

12. Christopher H Berry (2 out of 11 patents)

13. Bernhard Cordts (2 out of 2 patents)

14. Micahel L Alles (2 out of 2 patents)

15. Bernhardt F Cordts, Iii (2 out of 2 patents)

23 patents: Sort by Forward Citations

1. 7294561 - Internal gettering in SIMOX SOI silicon substrates (2007-11-13),

2. 7112509 - Method of producing a high resistivity SIMOX silicon substrate (2006-09-26),

3. 6998353 - Active wafer cooling during damage engineering implant to enhance buried oxide formation in SIMOX wafers (2006-02-14),

4. 6989315 - SIMOX using controlled water vapor for oxygen implants (2006-01-24),

5. 6863736 - Shaft cooling mechanisms (2005-03-08),

6. 6815696 - Beam stop for use in an ion implantation system (2004-11-09),

7. 6794662 - Thermosetting resin wafer-holding pin (2004-09-21),

8. 6794264 - Implantation process using substoichiometric, oxygen doses at different energies (2004-09-21),

9. 6774376 - Wafer holding pin (2004-08-10),

10. 6744017 - Wafer heating devices for use in ion implantation systems (2004-06-01),

11. 6661017 - Ion implantation system having an energy probe (2003-12-09),

12. 6593173 - Low defect density, thin-layer, SOI substrates (2003-07-15),

13. 6452195 - Wafer holding pin (2002-09-17),

14. 6433342 - Coated wafer holding pin (2002-08-13),

15. 6423975 - Wafer holder for simox processing (2002-07-23),

Founded in 1983, Ibis Technology Corporation is a leading manufacturer of advanced semiconductor processing equipment. With a strong focus on research and development, we deliver state-of-the-art solutions for the semiconductor industry. Our cutting-edge technologies enable the production of high-quality microchips used in a wide range of applications, including electronics, telecommunications, and automotive. Ibis Technology is committed to providing innovative solutions, exceptional customer service, and sustainable manufacturing practices.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

23 Patents

#11 in Danvers, MA

#837 in Massachusetts

#13,925 in US

#26,790 in the World

Danvers, MA, United States of America

Ibis Technology Corporation

Forward Citations = 398

26 inventors:

Robert Dolan (5 out of 5 patents)

Bernhard F Cordts, Iii (5 out of 5 patents)

Julian G Blake (4 out of 59 patents)

4. William Leavitt (4 out of 9 patents)

5. Steven Richards (4 out of 9 patents)

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