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Danvers, MA, United States of America

Ibis Technology Corporation

USPTO Granted Patents = 23

% Expired Patents = 47.8

Forward Citations = 401

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26 inventors (with patents filed for the assignee):

Robert Dolan (5 out of 5 patents)

Bernhard F Cordts, Iii (5 out of 5 patents)

Julian G Blake (4 out of 59 patents)

4. William Leavitt (4 out of 9 patents)

5. Steven Richards (4 out of 9 patents)

6. Geoffrey Ryding (3 out of 56 patents)

7. Yuri Erokhin (3 out of 4 patents)

8. Maria J Anc (3 out of 3 patents)

9. Robert S Andrews (3 out of 3 patents)

10. Theodore H Smick (3 out of 50 patents)

11. Marvin Farley (2 out of 41 patents)

12. Christopher H Berry (2 out of 11 patents)

13. Bernhard Cordts (2 out of 2 patents)

14. Micahel L Alles (2 out of 2 patents)

15. Bernhardt F Cordts, Iii (2 out of 2 patents)

23 patents: Sort by Forward Citations

1. 7294561 - Internal gettering in SIMOX SOI silicon substrates (2007-11-13),

2. 7112509 - Method of producing a high resistivity SIMOX silicon substrate (2006-09-26),

3. 6998353 - Active wafer cooling during damage engineering implant to enhance buried oxide formation in SIMOX wafers (2006-02-14),

4. 6989315 - SIMOX using controlled water vapor for oxygen implants (2006-01-24),

5. 6863736 - Shaft cooling mechanisms (2005-03-08),

6. 6815696 - Beam stop for use in an ion implantation system (2004-11-09),

7. 6794662 - Thermosetting resin wafer-holding pin (2004-09-21),

8. 6794264 - Implantation process using substoichiometric, oxygen doses at different energies (2004-09-21),

9. 6774376 - Wafer holding pin (2004-08-10),

10. 6744017 - Wafer heating devices for use in ion implantation systems (2004-06-01),

11. 6661017 - Ion implantation system having an energy probe (2003-12-09),

12. 6593173 - Low defect density, thin-layer, SOI substrates (2003-07-15),

13. 6452195 - Wafer holding pin (2002-09-17),

14. 6433342 - Coated wafer holding pin (2002-08-13),

15. 6423975 - Wafer holder for simox processing (2002-07-23),

Founded in 1983, Ibis Technology Corporation is a leading manufacturer of advanced semiconductor processing equipment. With a strong focus on research and development, we deliver state-of-the-art solutions for the semiconductor industry. Our cutting-edge technologies enable the production of high-quality microchips used in a wide range of applications, including electronics, telecommunications, and automotive. Ibis Technology is committed to providing innovative solutions, exceptional customer service, and sustainable manufacturing practices.

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Company Badge

USPTO Data Jan 1 1976 - Sep 29 2026

Ibis Technology Corporation

23 Patents

#9 in Danvers, MA

#863 in Massachusetts

#14,401 in US

#27,619 in the World

Danvers, MA, United States of America

Ibis Technology Corporation

Forward Citations = 401

26 inventors:

Robert Dolan (5 out of 5 patents)

Bernhard F Cordts, Iii (5 out of 5 patents)

Julian G Blake (4 out of 59 patents)

4. William Leavitt (4 out of 9 patents)

5. Steven Richards (4 out of 9 patents)

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