Robert S Andrews

Title: The Innovations of Robert S. Andrews

Introduction

Robert S. Andrews is a notable inventor based in Kensington, NH (US). He has made significant contributions to the field of wafer processing technology, holding a total of three patents. His work primarily focuses on enhancing the efficiency and safety of wafer handling during ion implantation processes.

Latest Patents

Among his latest patents is the "Wafer Holding Pin," which features a unique assembly that includes first and second main structural members with wafer-holding arms. The first arm is secured by a graphite distal retaining member, while the second arm is pivotally biased to hold the wafer in place. This design provides a conductive path to inhibit electrical discharges during the ion implantation process. Additionally, the assembly can include extra graphite retaining members to maintain structural integrity during extreme conditions associated with SIMOX wafer processing. The wafer-contacting pins are made from silicon and can be coated with titanium nitride to enhance electrical contact and provide an abrasion-resistant surface. Another patent, "Wafer Holder for SIMOX Processing," shares similar features and innovations, further showcasing Andrews' expertise in this area.

Career Highlights

Robert S. Andrews is currently employed at Ibis Technology Corporation, where he continues to develop innovative solutions for wafer processing. His work has been instrumental in advancing the technology used in the semiconductor industry.

Collaborations

Andrews has collaborated with notable coworkers, including Theodore H. Smick and Bernhard F. Cordts, III. Their combined efforts contribute to the ongoing advancements in wafer technology.

Conclusion

Robert S. Andrews is a distinguished inventor whose patents have significantly impacted wafer processing technology. His innovative designs and collaborative efforts continue to shape the future of the semiconductor industry.