Bernhard F Cordts, Iii

Title: The Innovations of Bernhard F Cordts, III

Introduction

Bernhard F Cordts, III is a notable inventor based in Ipswich, MA (US). He has made significant contributions to the field of technology, particularly in the area of wafer handling systems. With a total of five patents to his name, Cordts has demonstrated a commitment to innovation and problem-solving in his work.

Latest Patents

One of his latest patents is a wafer holding pin assembly. This innovative design includes first and second main structural members from which wafer-holding arms extend. The first arm is secured to the main structural members by a graphite distal retaining member, while the second arm is pivotally biased to a wafer-hold position by a graphite bias member. This arrangement provides a conductive path from the wafer to the assembly, inhibiting electrical discharges during the ion implantation process. The assembly is designed to maintain structural integrity during extreme conditions associated with SIMOX wafer processing, eliminating the need for potentially wafer-contaminating adhesives and conventional fasteners. The wafer-contacting pins at the distal end of the arms can be formed from silicon, which may be coated with titanium nitride to enhance electrical contact and provide an abrasion-resistant surface. The design minimizes the amount of pin material proximate to the wafer, reducing the likelihood of electrical arcing.

Career Highlights

Cordts is currently associated with Ibis Technology Corporation, where he continues to develop innovative solutions in wafer processing technology. His work has been instrumental in advancing the efficiency and reliability of wafer handling systems.

Collaborations

Throughout his career, Cordts has collaborated with notable colleagues, including Theodore H Smick and Robert S Andrews. These partnerships have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Bernhard F Cordts, III is a distinguished inventor whose work in wafer handling technology has made a significant impact in the field. His innovative designs and collaborative efforts continue to push the boundaries of technology, ensuring advancements in semiconductor processing.