Yoshihiro Koyama

Title: Innovations of Yoshihiro Koyama

Introduction

Yoshihiro Koyama is a prominent inventor based in Chiba, Japan. He has made significant contributions to the field of technology, particularly in the development of advanced ion sources and charged particle beam apparatuses. With a total of 12 patents to his name, Koyama's work has had a substantial impact on semiconductor technology.

Latest Patents

Koyama's latest patents include a liquid metal ion source and a focused ion beam apparatus. The liquid metal ion source features a reservoir designed to hold an ion material that forms a liquid metal. It includes a needle electrode and an extraction electrode that facilitates the emission of ions from the needle's distal end. Additionally, a beam diaphragm is positioned downstream of the extraction electrode to limit the beam diameter of the emitted ions. The apparatus is housed within a vacuum chamber that accommodates all components, including an oxidizing gas introducing portion that introduces an oxidizing gas around the needle electrode.

Another notable patent is a charged particle beam apparatus that enables faster semiconductor film deposition compared to traditional methods using silicon hydrides and halides as source gases. This apparatus comprises a charged particle source, a condenser lens electrode, a blanking electrode, a scanning electrode, and a sample stage for mounting samples. It also includes a secondary charged particle detector and a reservoir for accommodating cyclopentasilane as a source gas, along with a gas gun for supplying the source gas to the sample.

Career Highlights

Throughout his career, Koyama has worked with notable companies such as Seiko Instruments Inc. and Sii Nanotechnology Inc. His experience in these organizations has contributed to his expertise in the field of semiconductor technology and ion beam applications.

Collaborations

Koyama has collaborated with several professionals in his field, including Kenichi Nishinaka and Takashi Ogawa. These collaborations have likely enhanced his research and development efforts, leading to innovative solutions in technology.

Conclusion

Yoshihiro Koyama's contributions to the field of technology through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in semiconductor technology and ion beam applications.