The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
Mar. 05, 1999
Yoshihiro Koyama, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
A charged beam system is provided which includes: a focusing lens system for focusing an ion beam emitted from an ion source; scanning electrodes for applying the focused ion beam onto a predetermined area on a surface of a specimen while scanning the predetermined area on the surface of the specimen with the focused ion beam; a secondary charged particle detector for detecting secondary charged particles which are generated from the surface of the specimen by the application of the focused ion beam thereonto; and a display device for displaying thereon an image on the surface of the specimen on the basis of signals outputted from the secondary charged particle detector, wherein the lens system is made of a material which has corrosion resistance against a halogen series gas or high resistance resistors are inserted between the lens and a control power source for applying high voltages to the lens.