The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Sep. 21, 2020
Hitachi High-tech Science Corporation, Tokyo, JP;
Yoshihiro Koyama, Tokyo, JP;
Tatsuya Asahata, Tokyo, JP;
Masahiro Kiyohara, Tokyo, JP;
Tsunghan Yang, Tokyo, JP;
HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo, JP;
Abstract
A liquid metal ion source () includes: a reservoir () configured to hold an ion material (M) forming a liquid metal; a needle electrode (); an extraction electrode () configured to cause an ion of the ion material to be emitted from a distal end of the needle electrode; a beam diaphragm (), which is arranged on a downstream side of the extraction electrode, and is configured to limit a beam diameter of the ion; and a vacuum chamber () configured to accommodate and hold the reservoir, the needle electrode, the extraction electrode, and the beam diaphragm in vacuum, wherein the liquid metal ion source further includes an oxidizing gas introducing portion (), and wherein the oxidizing gas introducing portion communicates to the vacuum chamber, and is configured to introduce an oxidizing gas into a periphery of the needle electrode.