The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
Sep. 03, 1997
Applicant:
Inventors:
Yoshihiro Koyama, Chiba, JP;
Yasuhiko Sugiyama, Chiba, JP;
Assignee:
Seiko Instruments, Inc., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250309 ; 250307 ; 25049221 ;
Abstract
An ion beam working apparatus which can carry out a plurality of workings with good accuracy automatically is provided. When an ion beam current is changed, by setting differences in ion beam optical conditions, working without focal point shift or working position shift becomes possible and throughput increases can be expected. Differences in ion beam optical conditions of when an ion beam current is changed are stored in a computer and when the ion beam current amount is changed midway through automatic working those stored differences in ion beam optical conditions are set in the ion beam optical system.