Location History:
- Yamanashi, JP (2011 - 2023)
- Nirasaki, JP (2011 - 2024)
Company Filing History:
Years Active: 2011-2025
Title: The Innovations of Takashi Sakuma
Introduction
Takashi Sakuma, a prominent inventor based in Nirasaki, Japan, has made significant contributions to the field of substrate processing through his inventive methodologies. With a remarkable portfolio of 16 patents, he has established himself as a leading figure in the semiconductor manufacturing industry.
Latest Patents
Among his notable recent inventions are two key patents that reflect his expertise and innovative spirit. The first patent relates to a substrate processing method and apparatus designed for forming a ruthenium film on a substrate. This process involves placing the substrate on a stage within a processing container, wherein a ruthenium-containing gas and carbon monoxide gas are alternately supplied, followed by an exhaust phase to facilitate optimal film formation.
The second patent outlines a method for etching silicon oxide film from a substrate's surface. This innovative technique involves heating the substrate to at least 60°C while alternately supplying hydrogen fluoride gas and ammonia gas. This process modifies the silicon oxide, successfully creating a reaction product, which is then methodically removed while maintaining substrate temperature.
Career Highlights
Takashi Sakuma is employed by Tokyo Electron Limited, a leading company in the semiconductor industry. Over his career, he has played an instrumental role in the advancement of substrate processing technologies. His patents not only demonstrate technical prowess but also contribute to enhanced efficiency in semiconductor fabrication processes.
Collaborations
Sakuma has collaborated with notable colleagues, including Osamu Yokoyama and Tadahiro Ishizaka, further enriching his work with diverse insights and expertise. These partnerships exemplify the collaborative spirit of innovation within the high-tech industry.
Conclusion
In summary, Takashi Sakuma's inventive contributions significantly impact the field of semiconductor processing. His latest patents underscore his commitment to innovation, enhancing manufacturing methods, and driving advancements within the industry. The collaborative efforts with his peers serve to further amplify the potential for future breakthroughs in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.