Hamamatsu, Japan

Suguru Tabara


Average Co-Inventor Count = 1.1

ph-index = 10

Forward Citations = 215(Granted Patents)


Company Filing History:


Years Active: 1995-2007

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26 patents (USPTO):Explore Patents

Title: Innovations by Suguru Tabara in Semiconductor Technology

Introduction

Suguru Tabara, based in Hamamatsu, Japan, is an accomplished inventor with a notable record of 26 patents to his name. His contributions to semiconductor technology have led to significant advancements in the manufacturing processes, showcasing his expertise and innovative spirit.

Latest Patents

Among his latest patents is the "Method of Manufacturing Semiconductor Device." This innovative approach involves a two-step etching process to enhance the reliability of semiconductor devices by preventing oxidation at crucial interfaces. The first step focuses on the anisotropic etching of a conductive film on a dielectric layer, while the second step maximizes the etching selectivity to preserve critical film thickness.

Another notable patent is the "Wiring Forming Method." This method encompasses a multi-layer approach where a wiring material layer, formed on an insulation film, is processed through a series of photolithographic and etching steps. The method effectively utilizes antireflection coatings and precise patterns to create robust wiring layers, vital for the efficiency of semiconductor devices.

Career Highlights

Suguru Tabara has worked with prominent companies in the field, including Yamaha Corporation and Rohm Co., Ltd. His roles in these organizations have allowed him to leverage his technical knowledge and contribute to groundbreaking technologies in semiconductor manufacturing, solidifying his reputation as an expert inventor.

Collaborations

During his career, Suguru Tabara has collaborated with esteemed colleagues such as Hiroshi Nakaya and Satoshi Hibino. These professional relationships have further propelled his research and innovation in semiconductor technologies, leading to a shared success in advancing their respective fields.

Conclusion

Suguru Tabara's remarkable contributions to semiconductor technology through his patents and collaborative efforts have established him as a leading figure in the industry. His innovative approaches to manufacturing techniques continue to influence the development of advanced electronic devices, reflecting the vital role that inventors like him play in shaping the future of technology.

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