San Jose, CA, United States of America

Sudha S Rathi

USPTO Granted Patents = 30 

Average Co-Inventor Count = 5.6

ph-index = 9

Forward Citations = 279(Granted Patents)


Company Filing History:


Years Active: 2002-2024

where 'Filed Patents' based on already Granted Patents

30 patents (USPTO):

Title: Sudha S Rathi: A Luminary in Semiconductor Innovation

Introduction

Sudha S Rathi, based in San Jose, California, has made remarkable contributions to the field of semiconductor technology. With an impressive portfolio of 30 patents, he stands out as a significant innovator in his industry, particularly within his role at Applied Materials, Inc. His work focuses on enhancing semiconductor processing techniques, contributing to advancements that are pivotal for the semiconductor manufacturing process.

Latest Patents

Sudha's latest patents demonstrate his inventive prowess in addressing critical challenges in semiconductor processing. One of his notable patents describes methods for controlling deposition defects by forming a plasma of a carbon-containing precursor within a semiconductor processing chamber. This innovative approach involves depositing a carbon-containing material on a substrate and subsequently halting the flow of the precursor, thereby optimizing material deposition.

Another significant patent aims to minimize wafer backside damage during processing through a specially designed substrate support. This support features a chucking surface with varying substrate supporting features that increase radially, along with a silicon nitride seasoning layer. Such advancements are crucial for improving the efficiency and quality of semiconductor manufacturing.

Career Highlights

Throughout his career, Sudha has exemplified commitment to innovation in semiconductor technology. His work at Applied Materials, Inc. showcases his ability to tackle complex technical challenges and contribute to the advancement of processing methodologies that are fundamental to the semiconductor industry.

Collaborations

Sudha's innovative journey has seen him collaborate with esteemed colleagues such as Martin Jay Seamons and Bok Hoen Kim. These partnerships have fostered a dynamic exchange of ideas and expertise, further enriching the scope of research and development within the company.

Conclusion

Sudha S Rathi is an influential inventor whose contributions continue to push the boundaries of semiconductor technology. His extensive patent portfolio reflects his dedication to innovation, and his impact is felt within the industry as he works to enhance the efficiency and capabilities of semiconductor processing. With continued collaboration and a focus on inventive solutions, Sudha is sure to remain a key player in this essential technological field.

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