Michiro Sugitani

Title: Michiro Sugitani - A Pioneer in Semiconductor Device Manufacturing

Introduction

Michiro Sugitani is a notable inventor based in Ehime, Japan, who has significantly contributed to the field of semiconductor technology. With a total of 14 patents to his name, Sugitani's work focuses on innovative manufacturing methods that enhance semiconductor device production and performance.

Latest Patents

One of his latest patented inventions is a manufacturing method of semiconductor devices that involves the formation of a silicon Fin part on a silicon substrate. This method includes the formation of a thin film containing impurity atoms, which serve as donors or acceptors. The innovation is characterized by ensuring that the thickness of the thin film is greater on the upper flat portion of the silicon Fin compared to the side walls. Sugitani's technique employs first and second diagonal ion implantation processes, facilitating the controlled recoiling of impurity atoms into various parts of the device.

Another significant patent details a manufacturing method for semiconductor devices that begins with a semiconductor substrate possessing concave and convex features. The process involves depositing an impurity thin film on the substrate and executing diagonal ion implantation to effectively introduce impurity atoms into the substrate's surface features. These methods demonstrate Sugitani's expertise in advancing semiconductor technologies.

Career Highlights

Sugitani's career includes valuable experience at several prestigious companies. He held positions at Sumitomo Eaton Nova Corporation and Sen Corporation, affiliated with the renowned Axcelis Technologies. His tenure at these companies enabled him to develop groundbreaking technologies that push the boundaries of semiconductor manufacturing.

Collaborations

Throughout his career, Michiro Sugitani has collaborated with esteemed colleagues, including Mitsukuni Tsukihara and Mitsuaki Kabasawa. These partnerships have fostered a creative environment that has led to successful innovations in their field.

Conclusion

Michiro Sugitani is an inspiring inventor whose work in semiconductor device manufacturing continues to influence the industry. With numerous patents under his belt and a history of collaboration with talented colleagues, Sugitani stands out as a significant figure in technological advancements in Japan and beyond. His inventions not only showcase his ingenuity but also contribute to the future of semiconductor technologies.