The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2001
Filed:
Jun. 18, 1999
Michiro Sugitani, Niihama, JP;
Hiroyuki Kariya, Saijo, JP;
Mitsukuni Tsukihara, Ehime, JP;
Kenji Sawada, Niihama, JP;
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A method and apparatus is provided for controlling the operational parameters of a radio frequency (RF) linear accelerator (linac) (,) in an ion implanter (,). An operator or a higher level computer enters into an input device (,) the desired type of ions, the ionic valence value of ions, the extraction voltage of ion source (,), and the final energy value that is needed. Using internally stored numeric value calculation codes in parameter storage device (,), a control calculation device (,) simulates the ion beam acceleration or deceleration, and the anticipated dispersion of the ion beam, and calculates the RF linac operational parameters of amplitude, frequency and phase for obtaining an optimum transport efficiency. The parameter related to the amplitude is sent from control calculation device (,) to amplitude control device (,) which adjusts the amplitude of the output of RF power supply (,). The parameter related to the phase is sent to phase control device (,), which adjusts the phase of the output of RF power supply (,). The parameter related to the frequency is sent to frequency control device (,). Frequency control device (,) controls the output frequency of RF power supply (,) while it also controls the resonance frequency of RF resonator (,-,) of RF linac (,).