For the Inventor, By the Inventor

Enter assignee name

Beverly, MA, United States of America

Axcelis Technologies, Inc.

USPTO Granted Patents = 400

EPO Patents = 26

Trademarks = 2

Forward Citations = 6,154

Loading Chart...

Loading Chart...

296 inventors (with patents filed for the assignee):

Bo H Vanderberg (43 out of 43 patents)

Neil K Colvin (34 out of 35 patents)

Victor M Benveniste (33 out of 82 patents)

4. William F DiVergilio (30 out of 31 patents)

5. William Davis Lee (27 out of 112 patents)

6. Edward Eisner (25 out of 25 patents)

7. Shu Satoh (19 out of 29 patents)

8. Joseph Ferrara (18 out of 18 patents)

9. Michael A Graf (18 out of 30 patents)

10. Peter Lawrence Kellerman (18 out of 58 patents)

11. Tseh-Jen Hsieh (17 out of 24 patents)

12. Yongzhang Huang (17 out of 18 patents)

13. Neil J Bassom (17 out of 43 patents)

14. Robert D Rathmell (16 out of 16 patents)

15. Ivan Berry (15 out of 20 patents)

Core Competencies:

Ion Source

Hydraulic Feed System

High Temperature Ion Source

Dual Source Injector

Metal Contamination Control

High Power Wafer Cooling

Liquid Metal Ion Source

Beam Current Measurement

Electrostatic Clamping

Hydrogen Generator

Scanning Magnet Design

Film Stabilization

400 patents: Sort by Forward Citations

1. 12497687 - Ion implantation system and method for implanting aluminum using non-fluorine-containing halide species or molecules (2025-12-16),

2. 12476085 - Shielded gas inlet for an ion source (2025-11-18),

3. 12463003 - High temperature ion source (2025-11-04),

4. 12431332 - High energy implanter with small footprint (2025-09-30),

5. 12354834 - Method for setting gap between cathode and filament (2025-07-08),

6. 12154763 - Hydraulic feed system for an ion source (2024-11-26),

7. 12112918 - Dual source injector with switchable analyzing magnet (2024-10-08),

8. 12051561 - Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam (2024-07-30),

9. 11923169 - Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism (2024-03-05),

10. 11901198 - Toxic outgas control post process (2024-02-13),

11. 11887808 - Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity (2024-01-30),

12. 11823858 - Dual source injector with switchable analyzing magnet (2023-11-21),

13. 11798775 - Extended lifetime dual indirectly-heated cathode ion source (2023-10-24),

14. 11756772 - System and method for extending a lifetime of an ion source for molecular carbon implants (2023-09-12),

15. 11728187 - Method for decreasing cool down time with heated system for semiconductor manufacturing equipment (2023-08-15),

Axcelis Technologies, Inc. is a leading provider of innovative, high-productivity solutions for the semiconductor industry. For over 40 years, they have been developing and manufacturing ion implantation systems, a critical technology used in the fabrication of semiconductors. With a focus on enabling advanced chip production, Axcelis' solutions deliver the precision, speed, and reliability needed to meet the industry's evolving requirements. Their globally recognized products and superior customer support have made them a trusted partner for semiconductor manufacturers worldwide.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

400 Patents

#1 in Beverly, MA

#69 in Massachusetts

#1,128 in US

#2,260 in the World

Beverly, MA, United States of America

Axcelis Technologies, Inc.

Forward Citations = 6,154

296 inventors:

Bo H Vanderberg (43 out of 43 patents)

Neil K Colvin (34 out of 35 patents)

Victor M Benveniste (33 out of 82 patents)

4. William F DiVergilio (30 out of 31 patents)

5. William Davis Lee (27 out of 112 patents)

Please report any incorrect information to support@idiyas.com

Loading…