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Sen Corporation, an Shi and Axcelis Company

USPTO Granted Patents = 12

EPO Patents = 8

Trademarks = 2

Forward Citations = 70

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26 inventors (with patents filed for the assignee):

Mitsukuni Tsukihara (9 out of 26 patents)

Mitsuaki Kabasawa (7 out of 30 patents)

Takanori Yagita (4 out of 17 patents)

4. Junichi Murakami (4 out of 8 patents)

5. Michiro Sugitani (3 out of 14 patents)

6. Hiroshi Sogabe (3 out of 4 patents)

7. Keiji Okada (2 out of 14 patents)

8. Fumiaki Sato (2 out of 4 patents)

9. Hiroshi Kawaguchi (2 out of 5 patents)

10. Takashi Nishi (2 out of 2 patents)

11. Hiroshi Matsushita (1 out of 13 patents)

12. Suguru Hirokawa (1 out of 4 patents)

13. Yoshito Fujii (1 out of 4 patents)

14. Makoto Sano (1 out of 7 patents)

15. Masaki Ishikawa (1 out of 25 patents)

12 patents: Sort by Forward Citations

1. 8096744 - Wafer processing system, wafer processing method, and ion implantation system (2012-01-17),

2. 7947129 - Ion source apparatus and cleaning optimized method thereof (2011-05-24),

3. 7851772 - Ion implantation apparatus and ion implantation method (2010-12-14),

4. 7791049 - Ion implantation apparatus (2010-09-07),

5. 7687782 - Electrostatic beam deflection scanner and beam deflection scanning method (2010-03-30),

6. 7597531 - Method of controlling mover device (2009-10-06),

7. 7423276 - Irradiation system with ion beam/charged particle beam (2008-09-09),

8. 7361892 - Method to increase low-energy beam current in irradiation system with ion beam (2008-04-22),

9. 7351987 - Irradiation system with ion beam (2008-04-01),

10. 7315034 - Irradiation system with ion beam/charged particle beam (2008-01-01),

11. 7304319 - Wafer charge compensation device and ion implantation system having the same (2007-12-04),

12. 7276711 - Beam space-charge compensation device and ion implantation system having the same (2007-10-02),

Sen Corporation, an Shi and Axcelis Company, is a leading provider of innovative solutions for semiconductor manufacturing. With a focus on delivering high-quality equipment and services, Sen Corporation helps customers optimize their production processes and achieve superior results. Through collaboration with industry partners and continuous research and development, Sen Corporation is committed to driving technological advancements in the semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 2 2025

12 Patents

#1,519 in Tokyo

#3,833 in Japan

#46,633 in the World

Sen Corporation, an Shi and Axcelis Company

Forward Citations = 70

26 inventors:

Mitsukuni Tsukihara (9 out of 26 patents)

Mitsuaki Kabasawa (7 out of 30 patents)

Takanori Yagita (4 out of 17 patents)

4. Junichi Murakami (4 out of 8 patents)

5. Michiro Sugitani (3 out of 14 patents)

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