The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2009
Filed:
Jan. 28, 2005
Keiji Okada, Saijo, JP;
Michiro Sugitani, Niihama, JP;
Yoshitomo Hidaka, Yokohama, JP;
Junichi Murakami, Saijo, JP;
Fumiaki Sato, Saijo, JP;
Mitsukuni Tsukihara, Saijo, JP;
Suguru Hirokawa, Saijo, JP;
Masamitsu Shinozuka, Saijo, JP;
Keiji Okada, Saijo, JP;
Michiro Sugitani, Niihama, JP;
Yoshitomo Hidaka, Yokohama, JP;
Junichi Murakami, Saijo, JP;
Fumiaki Sato, Saijo, JP;
Mitsukuni Tsukihara, Saijo, JP;
Suguru Hirokawa, Saijo, JP;
Masamitsu Shinozuka, Saijo, JP;
SEN Corporation, an SHI and Axcelis Company, Tokyo, JP;
Abstract
Embodiments of the invention are directed to a method of controlling a mover device The method includes generating a moving force from a moving force generating unit to move a processing base with respect to a movable base, thereby moving the processing base with respect to a fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base. The method further includes controlling the moving velocity of the processing base with respect to the fixed base.