The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Feb. 20, 2004
Keiji Okada, Ehime, JP;
Yoshitomo Hidaka, Yokohama, JP;
Michiro Sugitani, Niihama, JP;
Junichi Murakami, Toyo, JP;
Fumiaki Sato, Saijo, JP;
Mitsukuni Tsukihara, Ehime, JP;
Suguru Hirokawa, Saijo, JP;
Masamitsu Shinozuka, Toyo, JP;
Keiji Okada, Ehime, JP;
Yoshitomo Hidaka, Yokohama, JP;
Michiro Sugitani, Niihama, JP;
Junichi Murakami, Toyo, JP;
Fumiaki Sato, Saijo, JP;
Mitsukuni Tsukihara, Ehime, JP;
Suguru Hirokawa, Saijo, JP;
Masamitsu Shinozuka, Toyo, JP;
Sumitomo Eaton Nova, Corporation, Tokyo, JP;
Abstract
A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.