Location History:
- Tokyo, JP (1989 - 2012)
- Fuchu, JP (2010 - 2016)
- Kawasaki, JP (2014 - 2018)
- Hachioji, JP (2017 - 2021)
Company Filing History:
18 out of 356 
2 out of 256 
1 out of 1 Years Active: 1989-2021
Title: Masami Shibagaki: Innovator in Semiconductor Technology
Introduction
Masami Shibagaki, based in Fuchu, JP, is a prominent inventor in the field of semiconductor technology. With an impressive portfolio, he holds 20 patents that encapsulate innovative solutions for advanced manufacturing processes. His contributions to the industry reflect a commitment to improving efficiency and productivity in semiconductor fabrication.
Latest Patents
Among his latest patents are significant advancements in etching and heat treatment technologies. One of his notable inventions is an etching apparatus that includes a chamber designed for evacuation, featuring a first electrode with a tray support that accommodates multiple substrates. This design facilitates the loading and unloading of substrates into and from the chamber while incorporating a voltage applying unit for enhanced functionality.
Another groundbreaking patent focuses on a heat treatment method and apparatus for semiconductor substrates. This invention addresses the critical need to improve the shapes of sharp corners at trench openings and bottoms without employing flammable or explosive gases, ultimately boosting productivity by optimizing treatment conditions within a sealed chamber.
Career Highlights
Masami Shibagaki's career encompasses significant roles at well-respected companies, including Canon Anelva Corporation and Anelva Corporation. His work in these organizations has allowed him to develop advanced technologies that contribute to the semiconductor industry.
Collaborations
During his career, Shibagaki has collaborated with notable coworkers, including Hiroshi Doi and Akihiro Egami. These partnerships have fostered an environment of innovation, enabling the development of cutting-edge technologies that push the boundaries of semiconductor manufacturing.
Conclusion
Masami Shibagaki's contributions to the field of semiconductor technology through his patents and collaborations illustrate his role as a key innovator. His work not only enhances manufacturing processes but also sets a foundation for future advancements within the industry. With a continued focus on innovation, Shibagaki remains a significant figure to watch in the realm of inventions related to semiconductors.