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Kanagawa-ken, Japan

Canon Anelva Engineering Corporation

USPTO Granted Patents = 1

Forward Citations = 2

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5 inventors (with patents filed for the assignee):

Hiroshi Doi (1 out of 19 patents)

Masami Shibagaki (1 out of 20 patents)

Toshiaki Sasaki (1 out of 2 patents)

4. Akihiro Egami (1 out of 6 patents)

5. Shinya Hasegawa (1 out of 8 patents)

1 patent: Sort by Forward Citations

1. 7897523 - Substrate heating apparatus, heating method, and semiconductor device manufacturing method (2011-03-01),

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USPTO Data Jan 1 1976 - Dec 30 2025

1 Patents

#74 in Kanagawa-ken

#15,559 in Japan

Kanagawa-ken, Japan

Canon Anelva Engineering Corporation

Forward Citations = 2

5 inventors:

Hiroshi Doi (1 out of 19 patents)

Masami Shibagaki (1 out of 20 patents)

Toshiaki Sasaki (1 out of 2 patents)

4. Akihiro Egami (1 out of 6 patents)

5. Shinya Hasegawa (1 out of 8 patents)

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