Location History:
- Ebina, JP (2011)
- Kawasaki, JP (2010 - 2015)
Company Filing History:
6 out of 355 
1 out of 1 Years Active: 2010-2015
Title: Akihiro Egami: Innovator in Thin Film Technology
Introduction
Akihiro Egami is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of thin film technology, holding a total of six patents. His work focuses on improving the performance and reliability of semiconductor devices.
Latest Patents
Egami's latest patents include a thin film forming apparatus, a thin film forming method, and a shield component. The inventors of this invention conducted tests and discovered that to prevent the peel-off of an adherent film, it is not essential to set the radius of curvature equal to or larger than a predetermined threshold. They found that peel-off occurs in regions where the curvature of a shield changes and is less likely to happen when the change in curvature is minimal. Therefore, the key to solving this issue lies in the magnitude of the change in curvature of the shield. By changing the curvature stepwise, it is possible to suppress large changes in curvature, thus preventing peel-off of an adherent film without causing disadvantages such as deterioration in film thickness distribution.
Another notable patent involves an annealing method for semiconductor devices with silicon carbide substrates. In this method, a silicon carbide (SiC) substrate implanted with impurities is annealed in an atmosphere where the partial pressure of HO is not larger than 10Pa. This approach effectively controls the surface irregularity of the silicon carbide substrate to be not greater than 2 nm, and preferably not greater than 1 nm in RMS value.
Career Highlights
Throughout his career, Akihiro Egami has worked with notable companies such as Canon Anelva Corporation and Canon Anelva Engineering Corporation. His expertise in thin film technology has made him a valuable asset in the semiconductor industry.
Collaborations
Egami has collaborated with several talented individuals, including Masami Shibagaki and Kenji Numajiri. Their combined efforts have contributed to advancements in the field of semiconductor technology.
Conclusion
Akihiro Egami's innovative work in thin film technology and semiconductor devices has led to significant advancements in the industry. His patents reflect a deep understanding of the challenges in this field and offer practical solutions to enhance device performance.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.