The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Jan. 27, 2009
Masami Shibagaki, Fuchu, JP;
Hiroshi Doi, Chofu, JP;
Akihiro Egami, Kawasaki, JP;
Toshiaki Sasaki, Tokorozawa, JP;
Shinya Hasegawa, Fuchu, JP;
Masami Shibagaki, Fuchu, JP;
Hiroshi Doi, Chofu, JP;
Akihiro Egami, Kawasaki, JP;
Toshiaki Sasaki, Tokorozawa, JP;
Shinya Hasegawa, Fuchu, JP;
Canon Anelva Engineering Corporation, Kanagawa-ken, JP;
Canon Anelva Corporation, Kanagawa-ken, JP;
Abstract
A substrate heating apparatus having a conductive heater which heats a substrate includes a filament arranged in the conductive heater and connected to a filament power supply to generate thermoelectrons, and an acceleration power supply which accelerates the thermoelectrons between the filament and conductive heater. The filament has inner peripheral portions formed at a predetermined interval along an inner circle concentric with the substrate, outer peripheral portions formed at a predetermined interval on an outer circle concentric with the inner circle and having a diameter larger than that of the inner circle, and a region formed by connecting the end point of each inner peripheral portions and the end point of a corresponding one of the outer peripheral portions.