The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Dec. 06, 2007
Masami Shibagaki, Fuchu, JP;
Kenji Numajiri, Chofu, JP;
Akihiro Egami, Kawasaki, JP;
Akira Kumagai, Kofu, JP;
Susumu Akiyama, Tokyo, JP;
Masami Shibagaki, Fuchu, JP;
Kenji Numajiri, Chofu, JP;
Akihiro Egami, Kawasaki, JP;
Akira Kumagai, Kofu, JP;
Susumu Akiyama, Tokyo, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
A substrate heating apparatus having a heating unit for heating a substrate placed in a process chamber which can be evacuated includes a suscepter which is installed between the heating unit and a substrate, and on which the substrate is mounted, and a heat receiving member which is installed to oppose the suscepter with the substrate being sandwiched between them, and receives heat from the heating unit via the suscepter. A ventilating portion which allows a space formed between the heat receiving member and substrate to communicate with a space in the process chamber is formed.