Kenji Numajiri

Title: Kenji Numajiri: Innovator in Heating Process Technology

Introduction

Kenji Numajiri is a notable inventor based in Chofu, Japan. He has made significant contributions to the field of heating process technology, holding two patents that showcase his innovative approach to substrate heating.

Latest Patents

Numajiri's latest patents include a heating process apparatus and a substrate heating apparatus for semiconductor fabrication. The heating process apparatus features a process chamber with a heat-processed object support member designed to heat a substrate. It includes a cap to cover the substrate, a heater for heating the support member, and a temperature measuring unit to monitor the temperature. The controller ensures that the cap temperature is maintained at a predetermined level while preventing overheating of the support member. The substrate heating apparatus, on the other hand, incorporates a heating unit and a suscepter that supports the substrate. It also includes a heat receiving member and a ventilating portion to facilitate communication between spaces in the process chamber.

Career Highlights

Kenji Numajiri is currently employed at Canon Anelva Corporation, where he continues to develop innovative technologies in the semiconductor industry. His work has been instrumental in advancing heating processes that are critical for efficient semiconductor fabrication.

Collaborations

Throughout his career, Numajiri has collaborated with talented individuals such as Masami Shibagaki and Akihiro Egami. These collaborations have contributed to the development of cutting-edge technologies in the field.

Conclusion

Kenji Numajiri's contributions to heating process technology have established him as a prominent inventor in the semiconductor industry. His innovative patents reflect his commitment to advancing technology and improving manufacturing processes.