The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Dec. 21, 2010
Akihiro Egami, Kawasaki, JP;
Toshikazu Nakazawa, Saitama, JP;
Katsuhiro Suzuki, Fuchu, JP;
Shinya Hasegawa, Fuchu, JP;
Akihiro Egami, Kawasaki, JP;
Toshikazu Nakazawa, Saitama, JP;
Katsuhiro Suzuki, Fuchu, JP;
Shinya Hasegawa, Fuchu, JP;
CANON ANELVA CORPORATION, Kawasaki-shi, JP;
Abstract
The inventors of this invention conducted a test and found out that to prevent peel-off of an adherent film, it is not of essential importance to set the radius of curvature equal to or larger than a predetermined threshold. The inventors of the present invention also found out that peel-off of an adherent film occurs in the region in which the curvature of a shield changes and is less likely to occur when the change in curvature of the shield is small. Accordingly, the key to the problem is the magnitude of a change in curvature of the shield, so changing the curvature stepwise makes it possible to suppress a large change in curvature, and thus to prevent peel-off of an adherent film free from any disadvantages such as deterioration in film thickness distribution, which may occur due to an increase in size of the shield.