The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Jun. 12, 2009
Nobuyuki Masaki, Saitama, JP;
Yuichi Sasuga, Yamanashi, JP;
Masami Shibagaki, Fuchu, JP;
Hiroshi Doi, Chofu, JP;
Nobuyuki Masaki, Saitama, JP;
Yuichi Sasuga, Yamanashi, JP;
Masami Shibagaki, Fuchu, JP;
Hiroshi Doi, Chofu, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
Deterioration of an O ring due to radiation heating in a vacuum heating apparatus is prevented to allow heat treatment of a substrate with good annealing properties. The vacuum heating apparatusincludes a vacuum chamberconstituted by flangesandhaving an opening portionand joined together, a turbo molecular pumpfor exhausting gas from the vacuum chamber, and a heater basefor heating a substrateplaced in the vacuum chamber. Joint surfaces of the flangesandare sealed by an O ring. Further, bonding stepsare formed between the heater baseand the O ringon the joint surfaces of the flangesand, thereby preventing thermo-radiation from the heater basefrom reaching the O ringthrough the joint surfaces of the flangesand