This inventor holds 3 USPTO granted patents. Top assignee: Canon Anelva Corporation. Active years: 2012-2015.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Yamanashi, JP (2012)
- Yamanashi-ken, JP (2013)
- Minamitsuru-gun, JP (2015)
Company Filing History:
Years Active: 2012-2015
Title: Innovations of Yuichi Sasuga
Introduction
Yuichi Sasuga is a notable inventor based in Minamitsuru-gun, Japan. He has made significant contributions to the field of semiconductor device manufacturing, holding a total of three patents. His work focuses on advanced heat treatment apparatuses and substrate processing methods.
Latest Patents
One of his latest patents is a heat treatment apparatus designed for semiconductor device manufacturing. This apparatus includes a vacuum vessel, a substrate stage for holding a substrate, a heating unit for heating the substrate, and an exhaust unit for evacuating the vacuum vessel. It features a first reflector that covers the upper portion of the exhaust port while being spaced apart from it, and a second reflector that surrounds the exhaust port. At least one of the reflector members forming the second reflector faces a direction defined from the heating unit to the exhaust port.
Another significant patent is a substrate processing apparatus that includes a chamber capable of being evacuated, a substrate stage for mounting a substrate, and a heating unit positioned above the substrate. This heating unit heats the substrate by radiant heat without direct contact. The apparatus also includes a retractable shutter that can be inserted into the space between the heating unit and the substrate, allowing for controlled heating and annealing of the substrate.
Career Highlights
Yuichi Sasuga is currently employed at Canon Anelva Corporation, where he continues to innovate in the semiconductor field. His work has been instrumental in advancing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers, including Masami Shibagaki and Hiroshi Doi, contributing to a dynamic team focused on innovation and development in their field.
Conclusion
Yuichi Sasuga's contributions to semiconductor technology through his patents and work at Canon Anelva Corporation highlight his role as a key innovator in the industry. His inventions continue to influence the future of semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile