Katsuhiko Komori

Title: The Innovations of Katsuhiko Komori

Introduction

Katsuhiko Komori, an accomplished inventor hailing from Nirasaki, Japan, has made significant contributions to the field of film technology. With a total of 13 patents to his name, his work is primarily centered around advancements in film forming apparatuses and methods, especially for semiconductor substrates. His expertise showcases the blend of engineering and chemistry in creating innovative solutions for modern manufacturing processes.

Latest Patents

Among his notable recent inventions are the Film Forming Apparatus and the Film Forming Method, both of which demonstrate his commitment to advancing technology in this niche. The Film Forming Apparatus is designed to perform a film forming process by heating substrates while they are held in a shelf shape within a vertical reaction container. This apparatus includes an exhaust part for evacuation, a gas supply part for introducing a film forming gas, and a heat insulating member to control the thermal environment around the substrates. This innovation seeks to enhance temperature distribution across the substrates by utilizing a strategically positioned through-hole in the heat insulating member.

The Film Forming Method, on the other hand, presents a novel approach for creating silicon, germanium, or silicon-germanium films on substrates with fine recesses. It employs a chemical vapor deposition method that selectively inhibits the adsorption of the film forming gas in the upper portions of the recesses, thereby ensuring uniform film deposition.

Career Highlights

Katsuhiko Komori currently works with Tokyo Electron Limited, a prominent company in the semiconductor manufacturing sector. His role has allowed him to significantly influence the development of innovative technologies that are crucial for efficient fabrication processes in the electronics industry.

Collaborations

Throughout his career, Komori has collaborated with several esteemed colleagues, including Mitsuhiro Okada and Kazuhide Hasebe. These collaborations have fostered an environment of shared knowledge and innovation, further enhancing the advancements within their field.

Conclusion

Katsuhiko Komori stands out as a leading inventor in film technology, driving progress with his inventive solutions. His recent patents reflect a profound understanding of both thermal dynamics and materials science, paving the way for improvements in semiconductor manufacturing. As industries continue to evolve, the contributions of inventors like Komori remain vital in shaping the future of technology.