Helmut Haidner

Title: **Helmut Haidner: Pioneer in Optical System Innovations**

Introduction

Helmut Haidner is a distinguished inventor based in Aalen, Germany, known for his significant contributions to the field of optical systems. With an impressive portfolio of 18 patents, Haidner has established himself as a prominent figure in the realm of measurement apparatus and microlithographic technologies.

Latest Patents

Haidner's recent patents showcase his innovative approach to addressing complex challenges in optical imaging. One of his latest inventions is a measurement apparatus designed for measuring wavefront aberration in an imaging optical system. This apparatus consists of a measurement wave generating module that produces a measurement wave, which is directed onto the optical system. The module includes an illumination system that illuminates a mask plane with light and incorporates coherence structures. Additionally, a wavefront measurement module captures the measurement wave after it passes through the optical system, allowing for the determination of any deviation from the desired wavefront. The evaluation device assesses how the intensity distribution of the illumination radiation in the mask plane influences the measurement results.

He also developed a microlithographic projection exposure apparatus that utilizes a projection lens to image object fields onto substrates during exposure operations. This apparatus features an illumination system with both an exposure illumination beam path and a measurement illumination beam path, the latter of which is crucial for evaluating measurement structures arranged in the mask plane.

Career Highlights

Throughout his career, Helmut Haidner has held influential positions in prestigious companies, such as Carl Zeiss SMT AG and Carl Zeiss SMT GmbH. His work in these organizations has allowed him to lead projects that push the boundaries of optical technology and contribute to advancements in the field.

Collaborations

Haidner has collaborated with notable colleagues, including Ulrich Wegmann and Martin Schriever. These partnerships have enabled him to combine expertise and creativity, resulting in groundbreaking inventions that benefit the industry.

Conclusion

Helmut Haidner's contributions to optical systems and measurement technologies underscore his role as a visionary inventor. With a growing portfolio of patents, he continues to influence the direction of innovations in the field, setting new standards for future developments. His work not only highlights the importance of precision in optical systems but also serves as an inspiration for aspiring inventors in the technology landscape.