The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Dec. 09, 2013
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Markus Goeppert, Karlsruhe, DE;
Helmut Haidner, Aalen, DE;
Rolf Freimann, Aalen, DE;
Christoph Striebel, Dornstadt, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 9/00 (2006.01); G03F 7/20 (2006.01); G01M 11/02 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
G03F 9/00 (2013.01); G01B 11/02 (2013.01); G01M 11/0264 (2013.01); G03F 7/706 (2013.01); G03F 7/7085 (2013.01);
Abstract
An objective for a projection exposure apparatus includes a metrology stage arranged on the frame of the objective. The objective includes at least one optical component, an objective mount for mounting the optical component, and a positioning device for holding at least one measuring device. The positioning device is connected to the objective mount and has at least one degree of freedom of displacement for displacing the measuring device.